Analytical Model for an Electrostatically Actuated Miniature Diaphragm Compressor

@inproceedings{Sathe2016AnalyticalMF,
  title={Analytical Model for an Electrostatically Actuated Miniature Diaphragm Compressor},
  author={Abhijit A Sathe and Eckhard A. Groll and Suresh V. Garimella},
  year={2016}
}
This paper presents a new analytical approach for quasi-static modeling of an electrostatically actuated diaphragm compressor that could be employed in a miniature scale refrigeration system. The compressor consists of a flexible circular diaphragm clamped at its circumference. A conformal chamber encloses the diaphragm completely. The membrane and the chamber surfaces are coated with metallic electrodes. A potential difference applied between the diaphragm and the chamber pulls the diaphragm… CONTINUE READING