Analysis on the surface electrical field of high voltage bulk-silicon LEDMOS with multiple field plates


In this paper, the surface electrical field distributions along the drift regions of the conventional LEDMOS, TPFP LEDMOS and M-TPFP LEDMOS were presented by MEDICI respectively. In terms of the analysis and discussion results on the changes of the electrical field peaks of the three high voltage LEDMOS, a method to improve the breakdown capability of the… (More)


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