Analysis of the Effect of ESD on the Operation of MEMS

Abstract

The effect of charge injection due to electrostatic discharge on the operation of capacitive microelectromechanical-systems (MEMS) structures is studied. A summary of charge transfer for the human-body model, the charged-device model (CDM), and the field-induced CDM is presented. The reliability of MEMS due to the trapped charge is assessed using a figure… (More)
DOI: 10.1109/08IAS.2008.104

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@article{Greason2008AnalysisOT, title={Analysis of the Effect of ESD on the Operation of MEMS}, author={William D. Greason}, journal={2008 IEEE Industry Applications Society Annual Meeting}, year={2008}, pages={1-7} }