An online test microstructure for thermal conductivity of surface-micromachined polysilicon thin films

@article{Xu2006AnOT,
  title={An online test microstructure for thermal conductivity of surface-micromachined polysilicon thin films},
  author={Gao-Bin Xu and Qing-An Huang},
  journal={IEEE Sensors Journal},
  year={2006},
  volume={6},
  pages={428-433}
}
An online test structure for measuring the thermal conductivity of surface micromachined polysilicon thin films is presented. In the structure, a pair of microstructures, i.e., a reference structure and a test structure, are used. The surface micromachined structures are heated electrically. Heat dissipation by convection, radiation, and heat transfer through the air gap and into the substrate is considered in an electrothermal model. The model is confirmed by ANSYS Software. In experiments… CONTINUE READING

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