An on-chip, attofarad interconnect charge-based capacitance measurement (CBCM) technique


In this paper, a sensitive and simple technique for parasitic interconnect capacitance measurement with 0.0l fF or 10 aF sensitivity is presented. This on-chip technique is based upon an efficient test structure design. No reference capacitor is needed. The measurement itself is also simple; only a DC current meter is required. We have applied this… (More)

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