An interface for eddy current displacement sensors with 15-bit resolution and 20 MHz excitation

@article{Nabavi2010AnIF,
  title={An interface for eddy current displacement sensors with 15-bit resolution and 20 MHz excitation},
  author={M. R. Nabavi and M. Pertijs and S. Nihtianov},
  journal={2010 Proceedings of ESSCIRC},
  year={2010},
  pages={290-293}
}
  • M. R. Nabavi, M. Pertijs, S. Nihtianov
  • Published 2010
  • Engineering, Computer Science
  • 2010 Proceedings of ESSCIRC
  • This paper presents a high-performance interface for eddy current displacement sensors, intended for use in IC fabrication equipment. The interface consists of a low-power front-end oscillator and a synchronous demodulator. With an excitation frequency of 20 MHz, it enables the use of targets with only a few tens of µm thickness. A ratio-metric measurement approach is applied to suppress the oscillator's noise contribution. The demodulator is auto-zeroed to suppress its 1/f noise. The interface… CONTINUE READING
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