An integrated electromagnetic micro-turbo-generator supported on encapsulated microball bearings

@article{Beyaz2012AnIE,
  title={An integrated electromagnetic micro-turbo-generator supported on encapsulated microball bearings},
  author={Mustafa İ. Beyaz and Brendan Michael Hanrahan and Jeremy Feldman and Reza Ghodssi},
  journal={2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS)},
  year={2012},
  pages={1209-1212}
}
The development and characterization of the first integrated electromagnetic micro-turbo-generator supported on encapsulated microball bearings are reported. The device presents a novel integration of encapsulated microballs that provide a simple operation and actuation scheme, a silicon microturbine rotor with thick magnetic components for high magnetic flux density, and wafer-thick copper coils for optimum magnetic flux linkage and low coil resistance. Spin-down testing of the microturbine… CONTINUE READING

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Ghodssi, "A Microfabricated Rotor Supported On Microball Bearings With Integrated Permanent Magnets

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2 Excerpts

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