An improved design for parallel plate MEMS variable capacitors

A MEMS variable capacitor having additional carrier beams is proposed. The use of the carrier beams increases the capacitor's tuning range and prevents the top plate from collapsing at a tuning range of 50%. The tuning range was measured and found to be 410% at 1 GHz with a maximum DC bias voltage of 9.2 volt. The achievable tuning range exceeds that of the… CONTINUE READING