An experimental characterization of Au-, Ru-, Rh- and Ni- based microcontacts for MEMS

Abstract

From several years, NOVA MEMS has developed a new set-up for the characterization of contact materials used in micro- switches. Comparisons between several pairs of contact materials have been done with this methodology using a commercial nanoindenter coupled with electrical measurements on test vehicles specially designed to investigate the underlying… (More)

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