An evolutionary approach for robust layout synthesis of MEMS

  title={An evolutionary approach for robust layout synthesis of MEMS},
  author={Zhun Fan and Jiachuan Wang and Min Wen and Erik D. Goodman and Ronald C. Rosenberg},
  journal={Proceedings, 2005 IEEE/ASME International Conference on Advanced Intelligent Mechatronics.},
The paper introduces a robust design method for layout synthesis of MEM resonators subject to inherent geometric uncertainties such as the fabrication error on the sidewall of the structure. The robust design problem is formulated as a multi-objective constrained optimisation problem after certain assumptions and treated with multiobjective genetic algorithm (MOGA), a special type of evolutionary computing approaches. Case study based on layout synthesis of a comb-driven MEM resonator shows… CONTINUE READING


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