An etched multilayer as a dispersive element in a curved‐crystal spectrometer: implementation and performance

@article{Jonnard2012AnEM,
  title={An etched multilayer as a dispersive element in a curved‐crystal spectrometer: implementation and performance},
  author={Philippe Jonnard and Karine Le Guen and Jean-michel Andr'e and Jean-Ren'e Coudevylle and Nathalie Isac},
  journal={X-Ray Spectrometry},
  year={2012},
  volume={41},
  pages={308-312}
}
  • Philippe Jonnard, Karine Le Guen, +2 authors Nathalie Isac
  • Published 2012
  • Physics, Chemistry
  • X-Ray Spectrometry
  • Etched multilayers obtained by forming a laminar grating pattern within interferential multilayer mirrors are used in the soft X-ray range to improve the spectral resolution of wavelength dispersive spectrometers equipped with periodic multilayers. We describe the fabrication process of such an etched multilayer dispersive element, its characterization through reflectivity measurement and simulations, and its implementation in a high-resolution Johann-type spectrometer. The specially designed… CONTINUE READING

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