An effective procedure for sensor variable selection and utilization in plasma etching for semiconductor manufacturing

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@article{Baek2014AnEP, title={An effective procedure for sensor variable selection and utilization in plasma etching for semiconductor manufacturing}, author={Kye Hyun Baek and Thomas F. Edgar and Kiwook Song and Gilheyun Choi and Han Ku Cho and Chonghun Han}, journal={Computers & Chemical Engineering}, year={2014}, volume={61}, pages={20-29} }