An automatically mode-matched MEMS gyroscope with 50 Hz bandwidth

  title={An automatically mode-matched MEMS gyroscope with 50 Hz bandwidth},
  author={Soner Sonmezoglu and S. E. Alper and T. Akin},
  journal={2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS)},
This paper presents the architecture and experimental verification of an automatic mode matching system that uses the phase relationship between the residual quadrature and drive signals in a gyroscope to accomplish and maintain the frequency matching condition. The system also allows controlling the system bandwidth by adjusting the closed loop controller parameters of the sense mode. This study experimentally examines the angle random walk (ARW) and bias instability performances of the fully… CONTINUE READING
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