An automatic mode matching system for a high Q-factor MEMS gyroscope using a decoupled perturbation signal

@article{Yesil2015AnAM,
  title={An automatic mode matching system for a high Q-factor MEMS gyroscope using a decoupled perturbation signal},
  author={Fahri Gurkan Yesil and Said Emre Alper and T. Akin},
  journal={2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)},
  year={2015},
  pages={1148-1151}
}
This paper reports a closed-loop controller system developed for in-run automatic matching of the drive and sense mode resonance frequencies of a MEMS gyroscope with a high quality factor (Q). This is achieved by injecting a perturbation signal to the quadrature cancellation loop, while keeping it decoupled from the angular rate control loop. The new controller is implemented in a CMOS ASIC together with the other sensor control loops, and it is verified to maintain matched-mode state under… CONTINUE READING

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