An analog closed-loop SC accelerometer interface for a capacitive high-Q sensor element

This paper presents an accelerometer interface circuit using a vacuum packaged MEMS sensor element. In order to damp the sensor element, increase the linearity and improve the input range of the sensor, a closed-loop analog SC interface with a PD-controller is used. The theoretical input range of sensor is ±1.4 g while measured range of the sensor is from… CONTINUE READING