• Corpus ID: 93025956

An SERS study of the galvanostatic sequence employed for the electrochemical deposition of Copper in the fabrication of Interconnects

@article{DUrzo2007AnSS,
  title={An SERS study of the galvanostatic sequence employed for the electrochemical deposition of Copper in the fabrication of Interconnects},
  author={Lucia DUrzo and Benedetto Bozzini},
  journal={arXiv: Materials Science},
  year={2007}
}
  • L. DUrzo, B. Bozzini
  • Published 29 December 2007
  • Materials Science, Chemistry
  • arXiv: Materials Science
This paper reports the first study carried out by surface-enhanced Raman spectroscopy (SERS) during the galvanostatic electrodeposition (ECD) of copper from an acidic sulphate solution, in the presence of polyethylene glycol (PEG), bis-(3-sulfopropyl)-disulfide Na salt (SPS), benzyl-phenyl modified polyethyleneimine (BPPEI) and chloride ions. The analysis of SERS spectra recorded during electrodeposition allowed to get an insight into the complex interfacial behaviour of the organic blend, in… 
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