An SERS study of the galvanostatic sequence employed for the electrochemical deposition of Copper in the fabrication of Interconnects
@article{DUrzo2007AnSS, title={An SERS study of the galvanostatic sequence employed for the electrochemical deposition of Copper in the fabrication of Interconnects}, author={Lucia DUrzo and Benedetto Bozzini}, journal={arXiv: Materials Science}, year={2007} }
This paper reports the first study carried out by surface-enhanced Raman spectroscopy (SERS) during the galvanostatic electrodeposition (ECD) of copper from an acidic sulphate solution, in the presence of polyethylene glycol (PEG), bis-(3-sulfopropyl)-disulfide Na salt (SPS), benzyl-phenyl modified polyethyleneimine (BPPEI) and chloride ions. The analysis of SERS spectra recorded during electrodeposition allowed to get an insight into the complex interfacial behaviour of the organic blend, in…
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