An RF MEMS Variable Capacitor with Intelligent Bipolar Actuation

  title={An RF MEMS Variable Capacitor with Intelligent Bipolar Actuation},
  author={Tamio Ikehashi and Takayuki Miyazaki and Hiroaki Yamazaki and Atsushi Suzuki and Etsuji Ogawa and Shinji Miyano and Tomohiro Saito and Tatsuya Ohguro and Takeshi Miyagi and Yoshiaki Sugizaki and Nobuaki Otsuka and Hideki Shibata and Yoshiaki Toyoshima},
  journal={2008 IEEE International Solid-State Circuits Conference - Digest of Technical Papers},
We propose an IBA scheme based on a pull-out detection, which is suitable for implementing in a circuit. The scheme is implemented in a driver IC that is part of a module with an RF MEMS variable capacitor. No failures are observed over 108 cycles at 85degC, which is an accelerated charging condition. 
Highly Cited
This paper has 22 citations. REVIEW CITATIONS

From This Paper

Topics from this paper.


Publications citing this paper.
Showing 1-10 of 17 extracted citations

Intelligent Bipolar Control of MEMS Capacitive Switches

IEEE Transactions on Microwave Theory and Techniques • 2013
View 1 Excerpt

Modelling of a charge control method for capacitive MEMS

2013 European Conference on Circuit Theory and Design (ECCTD) • 2013
View 1 Excerpt


Publications referenced by this paper.
Showing 1-3 of 3 references


Z. Peng, X. Yuan
C. M. Hwang et al., “Dielectric Charging of RF MEMS Capacitive Switches under Bipolar Control-Voltage Waveforms,” IEEE Microwave Symp., pp. 1817-1820 • 2007
View 2 Excerpts


H. Yamazaki, T. Ikehashi
Ohguro et al., “An intelligent bipolar actuation method with high stiction immunity for RF MEMS capacitive switches and variable capacitors,” Sensors and Actuators A: Physical, Vol. 139, Issues 1-2, pp. 233-236, Sept. 12 • 2007
View 2 Excerpts

A comprehensive model to predict the charging and reliability of capacitive RF MEMS switches,

W. Merlijn van Spengen, R. Puers, R. Mertens
J. Micromech. Microeng., • 2004
View 2 Excerpts

Similar Papers

Loading similar papers…