An Original Apparatus for Endurance Testing of MEMS Electrical Contact Materials


This paper presents a new experimental setup dedicated to the evaluation of contact materials for MEMS switches. The setup is an alternative way to more complex equipment like modified SPM or nanoindenter [1-4]. It has been designed to test various contact materials upon electrical cycling, without requiring any specific micro-fabricated test vehicles. The… (More)


7 Figures and Tables

Slides referencing similar topics