An Optical Fiber Fabry–Pérot Pressure Sensor Using an SU-8 Structure and Angle Polished Fiber

Abstract

In this letter, a novel pressure sensor using an SU-8 structure and angle polished fiber is proposed. There are two different Fabry-Pérot cavities in the design, and the cavity lengths can be demodulated at the same time to realize temperature compensation. SU-8 photoresist is suited for forming a high-aspect-ratio structure and the thickness can be… (More)

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Cite this paper

@article{Zhu2015AnOF, title={An Optical Fiber Fabry–Pérot Pressure Sensor Using an SU-8 Structure and Angle Polished Fiber}, author={Jiali Zhu and Ming Wang and Meng Shen and Lu Chen and Xiaoqi Ni}, journal={IEEE Photonics Technology Letters}, year={2015}, volume={27}, pages={2087-2090} }