An Optical Coordinate Measuring Machine for Nanoscale Dimensional Metrology

@article{Kirkland2004AnOC,
  title={An Optical Coordinate Measuring Machine for Nanoscale Dimensional Metrology},
  author={Eric Kirkland and Thomas R. Kurfess and Steven Y. Liang},
  journal={JACIII},
  year={2004},
  volume={8},
  pages={39-44}
}