An Integrated Tunable Band-Pass Filter Using MEMS Parallel-Plate Variable Capacitors Implemented with 0.35μm CMOS Technology

@article{Fouladi2007AnIT,
  title={An Integrated Tunable Band-Pass Filter Using MEMS Parallel-Plate Variable Capacitors Implemented with 0.35μm CMOS Technology},
  author={S. Fouladi and M. Bakri-Kassem and R F Mansour},
  journal={2007 IEEE/MTT-S International Microwave Symposium},
  year={2007},
  pages={505-508}
}
This paper presents an integrated tunable bandpass filter with RF MEMS varactors fabricated using the TSMC 0.35 μm CMOS process. A maskless post-processing technique is developed which enables the fabrication of RF MEMS parallel-plate capacitors with a high quality factor and a very compact size. A 2-pole coupled line tunable bandpass filter with a center frequency of 9.5 GHz and a 9% relative bandwidth is designed, fabricated and tested. A tuning range of 17% is achieved using integrated… CONTINUE READING
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