An Integrated Model-Data-Based Zero-Phase Error Tracking Feedforward Control Strategy With Application to an Ultraprecision Wafer Stage

Abstract

In precision motion control, well-designed feedforward control can effectively compensate the reference-induced tracking error. To achieve excellent tracking performance such as nanometer accuracy regardless of reference variations, an integrated model-data-based zero-phase error tracking feedforward control (ZPETFC) strategy is synthesized for precision… (More)
DOI: 10.1109/TIE.2016.2562606

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