An Integrated Low-Noise Sensing Circuit With Efficient Bias Stabilization for CMOS MEMS Capacitive Accelerometers

@article{Tan2011AnIL,
  title={An Integrated Low-Noise Sensing Circuit With Efficient Bias Stabilization for CMOS MEMS Capacitive Accelerometers},
  author={Siew-Seong Tan and Cheng-Yen Liu and Li-Ken Yeh and Yi-Hsiang Chiu and Michael S.-C. Lu and Klaus Y. J. Hsu},
  journal={IEEE Transactions on Circuits and Systems I: Regular Papers},
  year={2011},
  volume={58},
  pages={2661-2672}
}
A sensing circuit in 0.35 μm CMOS technology for CMOS MEMS capacitive accelerometers has been designed in this work with emphasis on managing noise, sensor offset, and the dc bias at input terminals. The issue of dc bias is particularly addressed and an efficient method is proposed. An example of integrating surface micromachined sensors and the designed sensing circuits on the same chip is demonstrated. Experimental results showed that the proposed circuit led to good noise performance, the… CONTINUE READING
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