An Impedance-Based Force Control Scheme to a Plate-to-Plate Nanoimprinter

@article{Jiang2016AnIF,
  title={An Impedance-Based Force Control Scheme to a Plate-to-Plate Nanoimprinter},
  author={Jun Jiang and Jingmeng Liu and Weihai Chen and Changyun Wen and Wenjie Chen},
  journal={IEEE Transactions on Nanotechnology},
  year={2016},
  volume={15},
  pages={328-336}
}
Nanoimprint lithography (NIL) is a novel technique that utilizes direct deformation of the resist to fabricate micro/nanometer scale patterns. NIL outperforms traditional photolithography technology for its low cost, high productivity, and high repeatability. For a general plate-to-plate NIL, it is of central importance to precisely control the embossing force during the entire embossing process to tune the orientation of the imprint head and also to guarantee the uniformity and fidelity… CONTINUE READING