An Experimental Study of Nonlinear Limits in High-Q Silicon Vibrating Micro-and Nanomechanical Sensors


In designing micro-scale vibrating sensors, the achievement of very high quality factor (Q) resonators working in bending mode remains a major issue. Nevertheless even though a high Q has several advantages, it enhances the chance of nonlinear vibrations. Special attention has been paid in this work to explore experimentally the nonlinear limitations of… (More)


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