An Artificial Neural Network EWMA Controller for Semiconductor Processes

  • Taber H. Smitha, Duane S. Boningb
  • Published 1997

Abstract

The linear exponentially weighted moving average (EWMA) controller has been shown to improve run by run process control for approximately linear processes which are subject to shifts or persistent drifts in the presence of noise. This work addresses the inability of the linear EWMA controller to adequately control processes which are poorly represented by… (More)

Topics

7 Figures and Tables