An Analytical Model of Joule Heating in Piezoresistive Microcantilevers

  title={An Analytical Model of Joule Heating in Piezoresistive Microcantilevers},
  author={Mohd. Zahid Ansari and Chongdu Cho},
The present study investigates Joule heating in piezoresistive microcantilever sensors. Joule heating and thermal deflections are a major source of noise in such sensors. This work uses analytical and numerical techniques to characterise the Joule heating in 4-layer piezoresistive microcantilevers made of silicon and silicon dioxide substrates but with the same U-shaped silicon piezoresistor. A theoretical model for predicting the temperature generated due to Joule heating is developed. The… CONTINUE READING


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