Amphibian XIS : An Immersion Lithography Microstepper Platform

@inproceedings{Smith2005AmphibianX,
  title={Amphibian XIS : An Immersion Lithography Microstepper Platform},
  author={Bruce W. Smith and Anatoly Y Bourov and Yongfa Fan and Frank Cropanese and Peter Hammond},
  year={2005}
}
Recent advances in immersion lithography have created the need for a small field microstepper to carry out the early learning necessary for next generation device application. Combined with fluid immersion, multiple-beam lithography can provide an opportunity to explore lithographic imaging at oblique propagation angles and extreme NA imaging. Using the… CONTINUE READING