Amorphous hydrogenated silicon carbonitride as low refractive index material in optical MEMS applications

Abstract

Microelectromechanical systems (MEMS) currently see a trend towards inclusion of optical functionalities, i.e., towards microoptoelectromechanical systems (MOEMS). However, typical MEMS materials such as silicon, silicon oxide and silicon nitride limit the choice of available refractive indices and spectral operating regions. Particularly, a low refractive… (More)

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