Amorphous carbon films deposited from carbon ions extracted from a discharge in fullerene vapor

@inproceedings{Maikena2000AmorphousCF,
  title={Amorphous carbon films deposited from carbon ions extracted from a discharge in fullerene vapor},
  author={E. B. Maikena and Peter Taborek},
  year={2000}
}
Amorphous carbon~a-C! films with physical properties ranging from diamond like to graphite like were deposited at rates of 1 mm/h under 10 Torr vacuum by extracting a molecular carbon ion beam from a pure carbon discharge in fullerene vapor. With ion energies fixed near 300 eV, substrate temperature and beam neutralization were the main process parameters… CONTINUE READING