Aluminum nitride thin film sensor for force, acceleration, and acoustic emission sensing

@inproceedings{Zheng1993AluminumNT,
  title={Aluminum nitride thin film sensor for force, acceleration, and acoustic emission sensing},
  author={Lei Zheng and Subbiah Ramalingam and Tian-Shen Shi and Ray Louis Peterson},
  year={1993}
}
To meet the real‐time process monitoring and control needs in machining automation, aluminum nitride thin film sensors have been implemented on WC–Co cutting inserts by rf sputtering. These piezoelectric sensors detect force, acceleration, and acoustic emission signals. Method of constructing, characterizing and evaluating AlN piezoelectric sensors are presented here. It is shown that c‐axis oriented AlN films can be deposited on WC–Co substrates to sense force, acceleration and acoustic… CONTINUE READING