Aluminum Nitride reconfigurable RF-MEMS front-ends

@article{Tazzoli2011AluminumNR,
  title={Aluminum Nitride reconfigurable RF-MEMS front-ends},
  author={Augusto Tazzoli and Matteo Rinaldi and Chengjie Zuo and Nipun Sinha and Jan Van der Spiegel and Gianluca Piazza},
  journal={2011 9th IEEE International Conference on ASIC},
  year={2011},
  pages={1046-1049}
}
Aluminum Nitride based piezoelectric microelectromechanical systems (MEMS) technology has the potential to develop a fully integrated radio frequency (RF) platform that satisfies the requirements of next-generation communication standards: reconfigurability, miniaturization, and low power consumption. Here we report on the recent developments of this AlN… CONTINUE READING