Aluminum Evaporation Conditions for SAW Interdigital Transducers

@article{Temmyo1980AluminumEC,
  title={Aluminum Evaporation Conditions for SAW Interdigital Transducers},
  author={Jiro Temmyo and Susumu Yoshikawa},
  journal={IEEE Transactions on Sonics and Ultrasonics},
  year={1980},
  volume={27},
  pages={219-220}
}
Minimum l w f u l AI film thickness for SAW interdigital transducers (IDT’s) is described. From the standpoints both of realizing high-performance SAW devices and of achieving precise design, i t is Manuscript received December 11, 1979;revised February 12, 1980. J. Temmyo is with Musashino Electrical Communication Laboratory, sashino-Shi, Tokyo 180, Japan. Nippon Telegraph and Telephone Public Corporation, Midoricho, Mutory, Nippon Telegraph and Telephone Public Corporation, Tokyo, Japan. He… CONTINUE READING

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Aging characteristics of SAW quartz devices-Annealing effects,

I. Kotaka, S. Yoshikawa
in Nat. Conv. Rec. IECE Jap., • 1978

Problems encountered in high-frequency surface-wave devices,

R. C. Williamson
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