All optically driven MEMS deformable mirrors via direct cascading with wafer bonded GaAs/GaP PIN photodetectors

Abstract

Significant progress has been made to realize optically controlled phase correction micro-mirror arrays. The devices consist of silicon nitride spring plate mirrors optically actuated by integrated GaAs P-I-N photodetectors wafer bonded on a GaP platform. 

5 Figures and Tables

Topics

  • Presentations referencing similar topics