All-fiber high-sensitivity pressure sensor with SiO2 diaphragm.

  title={All-fiber high-sensitivity pressure sensor with SiO2 diaphragm.},
  author={Denis Donlagic and Edvard Cibula},
  journal={Optics letters},
  volume={30 16},
The design and fabrication of a miniature fiber Fabry-Perot pressure sensor with a diameter of 125 microm are presented. The essential element in the process is a thin SiO2 diaphragm that is fusion spliced at the hollow end of an optical fiber. Good repeatability and high sensitivity of the sensor are achieved by on-line tuning of the diaphragm thickness during the sensor fabrication process. Various sensor prototypes were fabricated, demonstrating pressure ranges of from 0 to 40 kPa to 0 to 1… CONTINUE READING
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