Alignment performance comparison between MFR and MDCO for a TMA optical system

@inproceedings{Kang2015AlignmentPC,
  title={Alignment performance comparison between MFR and MDCO for a TMA optical system},
  author={Hyukmo Kang and Eunsong Oh and Sug-Whan Kim},
  booktitle={SPIE Optical Engineering + Applications},
  year={2015}
}
In this study, we performed alignment state estimation simulations and compared the performance of two Computer Aided Alignment (hereafter CAA) algorithms i.e. ‘Merit Function Regression (MFR)’ and ‘Multiple Design Configuration Optimization (MDCO)’ for a TMA optical system. The former minimizes the merit function using multi-field wavefront error measurements from single configuration, while the latter minimizes the merit function using single-field measured wavefront error from multiple… CONTINUE READING

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