AlN Contour-Mode Vibrating RF MEMS for Next Generation Wireless Communications

  title={AlN Contour-Mode Vibrating RF MEMS for Next Generation Wireless Communications},
  author={Gianluca Piazza and P. J. Stephanou and A. P. Pisano},
  journal={2006 European Solid-State Device Research Conference},
AlN contour-mode vibrating RF MEMS resonator technology is described as capable of low-loss filtering and frequency synthesis for next generation wireless devices. Contour-mode piezoelectric resonators can span frequencies from 10 MHz up to few GHz on the same silicon chip offering high quality factors in air (1,000-4,000) and low motional resistance (25-700 Omega). Low loss (<- 1.5 dB) electrically and mechanically coupled filters and low phase noise oscillators can be easily implemented using… CONTINUE READING


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800 MHz Low Motional Resistance Contour-Extensional Aluminum Nitride Micromechanical Resonators

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2 Excerpts

Piezoelectric Thin Film AlN Annular Dual Contour Mode Bandpass Filter

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Two-Port Stacked Contour-Mode Aluminum Nitride Piezoelectric Micromechanical Resonators

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1 Excerpt

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