Air-Gap Transmission Lines on Organic Substrates for Low-Loss Interconnects

  title={Air-Gap Transmission Lines on Organic Substrates for Low-Loss Interconnects},
  author={T. J. Spencer and P. Joseph and Tae Hong Kim and Madhavan Swaminathan and P. A. Kohl},
  journal={IEEE Transactions on Microwave Theory and Techniques},
The fabrication of low-loss transmission line structures with an air dielectric layer is described. The channels are characterized at low frequency (10 and 100 kHz) using capacitance and loss tangent and at high frequency (500 MHz to 10 GHz) using -parameter measurements. The incorporation of an air gap resulted in structures with effective dielectric constants between 1.5-1.8 and significantly lower loss tangents. The fabrication technique could be used to create more complicated air gap… CONTINUE READING


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