Advances in Capacitive, Eddy Current, and Magnetic Displacement Sensors and Corresponding Interfaces

  title={Advances in Capacitive, Eddy Current, and Magnetic Displacement Sensors and Corresponding Interfaces},
  author={B. George and Zhichao Tan and S. Nihtianov},
  journal={IEEE Transactions on Industrial Electronics},
  • B. George, Zhichao Tan, S. Nihtianov
  • Published 2017
  • Engineering, Computer Science
  • IEEE Transactions on Industrial Electronics
  • This paper presents a review of the latest advances in the field of capacitive, inductive (eddy current), and magnetic sensors, for measurement of absolute displacement. The need for accurate displacement and position measurement in the micrometer, nanometer, and subnanometer scales has increased significantly over the last few years. Application examples can be found in high-tech industries, metrology, and space equipment. Besides measuring displacement as a primary quantity, absolute… CONTINUE READING
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