Advanced surface micromachining process — A first step towards 3D MEMS

@article{Classen2017AdvancedSM,
  title={Advanced surface micromachining process — A first step towards 3D MEMS},
  author={Johannes Classen and Jochen Reinmuth and Arnd Kx00E4lberer and Andreas Scheurle and Sebastian Gx00FCnther and Stefan Kiesel and Bernt Schellin and Jx00F6rg Brx00E4uer and Laura Eicher},
  journal={2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS)},
  year={2017},
  pages={314-318}
}
An advanced micromachining process has been developed to further push the performance limits of mass-produced inertial MEMS. The main achievement of the new platform technology is the usage of two independent silicon layers instead of one to form, e.g., masses, springs, and free-standing electrodes. This dual layer process option opens the path towards new 3D-like sensor topologies with improved performance and smaller form-factors. The first accelerometer generations using this technology are… CONTINUE READING