Advanced methodologies for atomic-scale nanofabrication and dynamic characterization

  • Xing Wu, Litao Sun
  • Published 2013 in
    Proceedings of the 20th IEEE International…


Based on the idea of “setting up a nanolab inside a transmission electron microscopy (TEM)”, we review our recent progress in atomic resolution nanofabrication and dynamic characterization of individual nanostructures and nanodevices. The electron beam can be used as a tool to induce nanofabrication on the atomic scale. Additional probes from a special-designed holder provide the possibility to further manipulate and measure the electrical properties of the nanostructures. All phenomena from the in-situ TEM experiments can be recorded in real time with atomic resolution.

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Cite this paper

@article{Wu2013AdvancedMF, title={Advanced methodologies for atomic-scale nanofabrication and dynamic characterization}, author={Xing Wu and Litao Sun}, journal={Proceedings of the 20th IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA)}, year={2013}, pages={393-399} }