Advanced laser micromachining processes for MEMS and optical applications

@inproceedings{Holmes2006AdvancedLM,
  title={Advanced laser micromachining processes for MEMS and optical applications},
  author={A. Holmes and J. E. Pedder and K. Boehlen},
  booktitle={SPIE High-Power Laser Ablation},
  year={2006}
}
  • A. Holmes, J. E. Pedder, K. Boehlen
  • Published in
    SPIE High-Power Laser…
    2006
  • Engineering, Computer Science, Materials Science
  • Laser micromachining has great potential as a MEMS (micro-electro-mechanical systems) fabrication technique because of its materials flexibility and 3D capabilities. [...] Key Method The methods used in mask design are reviewed, and experimental results are presented for test structures fabricated in polycarbonate. Both techniques are shown to be capable of producing accurately dimensioned structures that are significantly deeper than the focal depth of the projection optics and virtually free from fabrication…Expand Abstract
    Laser micro-fabrication in RF MEMS switches
    • 2

    References

    Publications referenced by this paper.
    SHOWING 1-10 OF 14 REFERENCES
    Laser micromachining techniques for industrial MEMS applications
    • 5
    Laser micromachining: new developments and applications
    • 22
    • PDF
    Laser micromachining of biofactory-on-a-chip devices
    • 14
    Industrial applications of laser micromachining.
    • 200
    Characterization of microlenses by digital holographic microscopy.
    • 196
    • PDF