Advanced laser micromachining processes for MEMS and optical applications

  title={Advanced laser micromachining processes for MEMS and optical applications},
  author={A. Holmes and J. E. Pedder and K. Boehlen},
  booktitle={SPIE High-Power Laser Ablation},
  • A. Holmes, J. E. Pedder, K. Boehlen
  • Published in
    SPIE High-Power Laser…
  • Engineering, Computer Science, Materials Science
  • Laser micromachining has great potential as a MEMS (micro-electro-mechanical systems) fabrication technique because of its materials flexibility and 3D capabilities. [...] Key Method The methods used in mask design are reviewed, and experimental results are presented for test structures fabricated in polycarbonate. Both techniques are shown to be capable of producing accurately dimensioned structures that are significantly deeper than the focal depth of the projection optics and virtually free from fabrication…Expand Abstract
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