Advanced flexible CMOS integrated circuits on plastic enabled by controlled spalling technology

@article{Shahrjerdi2012AdvancedFC,
  title={Advanced flexible CMOS integrated circuits on plastic enabled by controlled spalling technology},
  author={Davood Shahrjerdi and Samantha Bedell and Ali Khakifirooz and Khermann Fogel and Paul Lauro and Kangguo Cheng and James Alan Ott and Michael A. Gaynes and Dr. Sadana},
  journal={2012 International Electron Devices Meeting},
  year={2012},
  pages={5.1.1-5.1.4}
}
We present, for the first time, mechanically-flexible advanced-node CMOS circuits, including SRAM and ring oscillators, with gate lengths <;30 nm and contacted gate pitch of 100 nm. Our novel layer transfer technique called “controlled spalling” is employed as an incredibly simple, low-cost, and manufacturable approach to separate the finished CMOS circuits from the host silicon substrate. The overall performance of the flexible devices and circuits are carefully examined, demonstrating… CONTINUE READING

From This Paper

Figures, tables, and topics from this paper.

Citations

Publications citing this paper.
SHOWING 1-8 OF 8 CITATIONS

Similar Papers

Loading similar papers…