Advanced MEMS for high power integrated distribution systems

@article{Kasim2005AdvancedMF,
  title={Advanced MEMS for high power integrated distribution systems},
  author={Rahim Kasim and Bruce C. Kim and Josef Drobnik},
  journal={2005 International Conference on MEMS,NANO and Smart Systems},
  year={2005},
  pages={247-252}
}
This paper presents a design and fabrication of advanced MEMS in high power applications. The developed MEMS is used as a circuit breaker for high power distribution systems. We designed and fabricated MxN array of low power MEMS switches to handle high power which are mass actuated by an external magnetic field.