Adaptive rate-dependent feedforward control for piezoelectric actuator

Abstract

Piezoelectric actuator is widely used in micro/nano applications due to advantages like high stiffness, rapid response and high resolution. However, the inherent hysteresis limits its performance in trajectory tracking. Moreover, the hysteresis nonlinearity is dependent of control input rate (which is called rate-dependent behavior). To make matters worse… (More)
DOI: 10.1109/COASE.2017.8256169

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