Adaptive RLS algorithm for nonlinearity modeling in the nanometrology system

Abstract

The periodic nonlinearity in the nanometrology systems based on the laser heterodyne interferometers mainly arises from imperfect laser source and misalignment of their optical setup. The accuracy of the nanometric displacement measurements can be effectively limited by the periodic nonlinearity. In this paper, we model the periodic nonlinearity in a… (More)

5 Figures and Tables

Topics

  • Presentations referencing similar topics