Adaptive Iterative Learning Control for High Precision Motion Systems

  title={Adaptive Iterative Learning Control for High Precision Motion Systems},
  author={Iuliana Rotariu and Maarten Steinbuch and Rogier Ellenbroek},
  journal={IEEE Transactions on Control Systems Technology},
Iterative learning control (ILC) is a very effective technique to reduce systematic errors that occur in systems that repetitively perform the same motion or operation. However, several characteristics have prevented standard ILC from being widely used for high precision motion systems. Most importantly, the learned feedforward signal depends on the motion profile (setpoint trajectory) and if this is altered, the learning process has to be repeated. Secondly, ILC amplifies non-repetitive… CONTINUE READING
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Time-frequency analysis of a motion system with learning control

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Highly Influential
4 Excerpts

Scanlength independent iterative learning control applied to a wafer stage motion system

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Highly Influential
4 Excerpts

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