Activation of sputter-processed indium–gallium–zinc oxide films by simultaneous ultraviolet and thermal treatments

@inproceedings{Tak2016ActivationOS,
  title={Activation of sputter-processed indium–gallium–zinc oxide films by simultaneous ultraviolet and thermal treatments},
  author={Young Jun Tak and Byung Du Ahn and Sung Pyo Park and Si Joon Kim and Ae Ran Song and Kwun-Bum Chung and Hyun Jae Kim},
  booktitle={Scientific reports},
  year={2016}
}
Indium-gallium-zinc oxide (IGZO) films, deposited by sputtering at room temperature, still require activation to achieve satisfactory semiconductor characteristics. Thermal treatment is typically carried out at temperatures above 300 °C. Here, we propose activating sputter- processed IGZO films using simultaneous ultraviolet and thermal (SUT) treatments to decrease the required temperature and enhance their electrical characteristics and stability. SUT treatment effectively decreased the amount… CONTINUE READING
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