Acoustic wave based MEMS devices for biosensing applications.

  title={Acoustic wave based MEMS devices for biosensing applications.},
  author={Ioana Voiculescu and Anis Nurashikin Nordin},
  journal={Biosensors & bioelectronics},
  volume={33 1},
This paper presents a review of acoustic-wave based MEMS devices that offer a promising technology platform for the development of sensitive, portable, real-time biosensors. MEMS fabrication of acoustic wave based biosensors enables device miniaturization, power consumption reduction and integration with electronic circuits. For biological applications, the biosensors are integrated in a microfluidic system and the sensing area is coated with a biospecific layer. When a bioanalyte interacts… CONTINUE READING
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