Acoustic characteristics of the third-order quasi-symmetric Lamb wave mode in an AlN/3C-SiC plate

Abstract

In this study, the phase velocity and electromechanical coupling coefficient of the third-order quasi-symmetric (QS3) Lamb wave mode in a composite membrane composed of an AlN film and a cubic silicon carbide (3C-SiC) layer are theoretically and experimentally investigated. According to the theoretical simulation results, the epitaxial 3C-SiC (100) layer… (More)

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